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Lyshevski, Sergey Edward.

MEMS and NEMS : systems, devices, and structures / Sergey Edward Lyshevski. - 461 páginas : ilustraciones ; 24 cm. - Nano- and microscience, engineering, technology, and medicine series .

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ISBN: 0849312620

Subjects--Topical Terms:
Sistemas microelectromecánicos

LC Class. No.: TK7875 / .L97 2002