Design and Manufacturing of Active Microsystems / edited by Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach.

Por:

Büttgenbach, Stephanus [editor.]

Colaborador(es):

Tipo de material: Texto

TextoSeries Microtechnology and MEMSEditor: Berlin, Heidelberg : Springer Berlin Heidelberg, 2011Descripción: xii, 444 páginas recurso en líneaTipo de contenido:

texto

Tipo de medio:

computadora

Tipo de portador:

recurso en línea

ISBN:

9783642129032

Formatos físicos adicionales: Edición impresa:: Sin títuloClasificación LoC:

T174.7

Recursos en línea:

Conectar a Springer E-Books (Para consulta externa se requiere previa autentificación en Biblioteca Digital UANL)

Contenidos:

1. Introduction -- 2. Design and Construction -- 3. Guiding and Measuring in Active Microsystems -- 4. Manufacturing and Fabrication -- 5. Microassembly -- 6.Industrial Applications.

Resumen: This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.

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Springer eBooks

1. Introduction -- 2. Design and Construction -- 3. Guiding and Measuring in Active Microsystems -- 4. Manufacturing and Fabrication -- 5. Microassembly -- 6.Industrial Applications.

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.

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