Integration of functional oxides with semiconductors / Alexander A. Demkov, Agham B. Posadas.
Tipo de material:
TextoEditor: New York, NY : Springer New York : Springer, 2014Descripción: x, 278 páginas : 146 ilustraciones, 113 ilustraciones en colorTipo de contenido: - texto
- computadora
- recurso en línea
- 9781461493204
- TK7800-8360
Contenidos:
Introduction -- Critical issues in Oxide-Semiconductor Heteroepitaxy -- Predictive Engineering of Semiconductor-Oxide Interfaces -- Crystalline Functional Oxide Growth Methods -- Thin Oxide Film Characterization Methods -- Growing SrTiO3 on Si (001) by Molecular Beam Epitaxy -- Integration of Functional Oxides on SrTiO3/Si Pseudo-Substrates -- Other Epitaxial Oxides on Semiconductors -- Outlook and Parting Thoughts -- Appendices.
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Introduction -- Critical issues in Oxide-Semiconductor Heteroepitaxy -- Predictive Engineering of Semiconductor-Oxide Interfaces -- Crystalline Functional Oxide Growth Methods -- Thin Oxide Film Characterization Methods -- Growing SrTiO3 on Si (001) by Molecular Beam Epitaxy -- Integration of Functional Oxides on SrTiO3/Si Pseudo-Substrates -- Other Epitaxial Oxides on Semiconductors -- Outlook and Parting Thoughts -- Appendices.
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