Lyshevski, Sergey Edward. <br/><br/>
MEMS and NEMS :  systems, devices, and structures / 
Sergey Edward Lyshevski. 
 - 461 páginas :  ilustraciones ;  24 cm. 
 - Nano- and microscience, engineering, technology, and medicine series .
<br/><br/>Incluye bibliografía e índice 
<br/><br/><label>ISBN: </label>0849312620 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Sistemas microelectromecánicos
<br/><br/><label>LC Class. No.: </label>TK7875  / .L97 2002