Design, modeling and control of nanopositioning systems /
Andrew J. Fleming, Kam K. Leang.
- xvi, 411 páginas : 261 ilustraciones, 180 ilustraciones en color.
- Advances in Industrial Control, 1430-9491 .
Springer eBooks
Introduction -- Piezoelectric Transducers -- Types of Nanopositioners -- Mechanical Design: Flexure-based Nanopositioners -- Position Sensors -- Shunt Control -- Feedback Control -- Force Feedback Control -- Feedforward Control -- Command Shaping -- Hysteresis Modeling and Control -- Charge Drives -- Noise in Nanopositioning Systems -- Electrical Considerations.