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020 _a9780387777474
_99780387777474
024 7 _a10.1007/9780387777474
_2doi
035 _avtls000332863
039 9 _a201509030209
_bVLOAD
_c201404122258
_dVLOAD
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040 _aMX-SnUAN
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_cMX-SnUAN
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050 4 _aTK7800-8360
100 1 _aLang, Jeffrey.
_eeditor.
_9303420
245 1 0 _aMulti-Wafer Rotating MEMS Machines :
_bTurbines, Generators, and Engines /
_cedited by Jeffrey Lang.
264 1 _aBoston, MA :
_bSpringer US :
_bImprint: Springer,
_c2010.
300 _axiv, 454 páginas 604 ilustraciones, 302 ilustraciones en color.
_brecurso en línea.
336 _atexto
_btxt
_2rdacontent
337 _acomputadora
_bc
_2rdamedia
338 _arecurso en línea
_bcr
_2rdacarrier
347 _aarchivo de texto
_bPDF
_2rda
490 0 _aMEMS Reference Shelf,
_x1936-4407
500 _aSpringer eBooks
505 0 _ato PowerMEMS -- System Design Considerations and Device Overview -- Materials, Structures and Packaging -- Microengine Fabrication -- Fabrication of Microscale Rotating Magnetic Machines -- High-Speed Gas Bearings for Micro-Turbomachinery -- Thermofluidics and Turbomachinery -- Motors and Generators -- Microcombustors for Rotating Machinery.
520 _aMulti-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines is an outgrowth of the MIT Micro Engine Project. This project began at the Massachusetts Institute of Technology in the Fall of 1995, and later expanded through collaborations with the Georgia Institute of Technology, the Clark Atlanta University, and the University of Maryland at College Park. The overall objective of the Micro Engine Project was to develop a small but power-dense gas turbine generator based on MEMS fabrication technologies. Thus, the project sought to develop a fuel-burning jet engine that would drive an electric generator to produce electric power for general purpose use. Along the way, the project would advance the science and engineering of many disciplines from the MEMS perspective. The Micro Engine Project was by its very nature a highly mult-disciplinary project pursuing advances in materials, structures, fabrication, combustion, heat transfer, turbomachinery, bearings and electromechanics, all at the MEMS scale. Many of these topics are addressed in this volume, including: materials structures and packaging multi-wafer MEMS fabrication and and bonding technologiesElectroplating magnetic components electroplating magnetic structures into silicon very-high-speed air bearings thermofluids and turbomachinery electric and magnetic generators combustion About The MEMs Reference Shelf: "The MEMs Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMs) which combine mechanical, electrical, optical, or fluidic elements on a common microfabricated substrate to create sensors, actuators, and microsystems. The series, authored by leading MEMs practitioners, strives to provide a framework where basic principles, known methodologies and new applications are integrated in a coherent and consistent manner." STEPHEN D. SENTURIA Massachusetts Institute of Technology, Professor of Electrical Engineering, Emeritus
590 _aPara consulta fuera de la UANL se requiere clave de acceso remoto.
710 2 _aSpringerLink (Servicio en línea)
_9299170
776 0 8 _iEdición impresa:
_z9780387777467
856 4 0 _uhttp://remoto.dgb.uanl.mx/login?url=http://dx.doi.org/10.1007/978-0-387-77747-4
_zConectar a Springer E-Books (Para consulta externa se requiere previa autentificación en Biblioteca Digital UANL)
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