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020 _a9780387473185
_99780387473185
024 7 _a10.1007/9780387473185
_2doi
035 _avtls000331528
039 9 _a201509030755
_bVLOAD
_c201404121856
_dVLOAD
_c201404091624
_dVLOAD
_c201401311418
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040 _aMX-SnUAN
_bspa
_cMX-SnUAN
_erda
050 4 _aTK7800-8360
100 1 _aGhodssi, Reza.
_eeditor.
_9304286
245 1 0 _aMEMS Materials and Processes Handbook /
_cedited by Reza Ghodssi, Pinyen Lin.
246 3 _aThe Handbook MEMs Materials and Processes offers a much more detailed treatment than the book by Leondes which is more general in its coverage and certainly less applied
264 1 _aBoston, MA :
_bSpringer US :
_bImprint: Springer,
_c2011.
300 _axxxvI, 1188 páginas, 200 ilustraciones
_brecurso en línea.
336 _atexto
_btxt
_2rdacontent
337 _acomputadora
_bc
_2rdamedia
338 _arecurso en línea
_bcr
_2rdacarrier
347 _aarchivo de texto
_bPDF
_2rda
490 0 _aMEMS Reference Shelf,
_x1936-4407 ;
_v1
500 _aSpringer eBooks
505 0 _aIntroduction – Reza Ghodssi and Pinyen Lin -- The MEMS Design Process – Tina Lamers and Beth Pruitt -- Additive Processes for Semiconductors and Dielectric Materials – Chris Zorman, Robert C. Roberts and Li Chen -- Additive Processes for Metals – David Arnold, Monika Saumer and Yong Kyu-Yoon -- Additive Processes for Polymeric Materials – Ellis Meng, Xin Zhang, and William Benard -- Additive Processes for Piezoelectric Materials – Ronald Polcawich, Jeff Pulskamp, Takashi Mineta, and Yoichi Haga -- Materials and Processes in Shape-Memory Alloy - Takashi Mineta and Yoichi Haga -- Dry Etching for Micromachining Applications – Srinivas Tadigadapa and Franz Laermer -- MEMS Wet-Etch Processes and Procedures – David Burns -- MEMS Lithography and Micromachining Techniques - Daniel Hines, Nathan Siwak, Lance Mosher and Reza Ghodssi -- Doping - Alan D. Raisanen -- Wafer Bonding – Shawn Cunningham and Mario Kupnik -- MEMS Packaging Materials – Ann Garrison Darrin and Robert Osiander -- Surface Treatment and Planarization – Pinyen Lin, Roya Maboudian, Carlo Carraro, Fan-Gang Tseng, Pen-Cheng Wang, and Yongqing Lan -- MEMS Process Integration – Michael Huff, Stephen Bart, and Pinyen Lin.              .
520 _aMEMS Materials and Processes Handbook is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on 'Materials' and 'Processes'. The extensive 'Material Selection Guide' and a 'Material Database' guides the reader through the selection of appropriate materials for the required task at hand. The 'Processes' section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs. The book also: Provides a comprehensive catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMS Discusses specific MEMS fabrication techniques such as additive, subtractive, and lithography/patterning, as well as wafer bonding, doping, surface treatment/preparation, and characterization techniques Provides the reader with a quick check list of the advantage/disadvantage of fabrication MEMS Material and Processes Handbook will be a valuable book for researchers, engineers and students working in MEMS and materials processing.           
590 _aPara consulta fuera de la UANL se requiere clave de acceso remoto.
700 1 _aLin, Pinyen.
_eeditor.
_9304287
710 2 _aSpringerLink (Servicio en línea)
_9299170
776 0 8 _iEdición impresa:
_z9780387473161
856 4 0 _uhttp://remoto.dgb.uanl.mx/login?url=http://dx.doi.org/10.1007/978-0-387-47318-5
_zConectar a Springer E-Books (Para consulta externa se requiere previa autentificación en Biblioteca Digital UANL)
942 _c14
999 _c279777
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