000 03891nam a22003735i 4500
001 290994
003 MX-SnUAN
005 20160429154824.0
007 cr nn 008mamaa
008 150903s2010 xxk| o |||| 0|eng d
020 _a9781849962544
_99781849962544
024 7 _a10.1007/9781849962544
_2doi
035 _avtls000344672
039 9 _a201509030424
_bVLOAD
_c201405050310
_dVLOAD
_y201402061303
_zstaff
040 _aMX-SnUAN
_bspa
_cMX-SnUAN
_erda
050 4 _aTJ241
100 1 _aGao, Wei.
_eautor
_9299166
245 1 0 _aPrecision Nanometrology :
_bSensors and Measuring Systems for Nanomanufacturing /
_cby Wei Gao.
264 1 _aLondon :
_bSpringer London,
_c2010.
300 _axiii, 354 páginas
_brecurso en línea.
336 _atexto
_btxt
_2rdacontent
337 _acomputadora
_bc
_2rdamedia
338 _arecurso en línea
_bcr
_2rdacarrier
347 _aarchivo de texto
_bPDF
_2rda
490 0 _aSpringer Series in Advanced Manufacturing,
_x1860-5168 ;
_v0
500 _aSpringer eBooks
505 0 _aAngle Sensor for Measurement of Surface Slope and Tilt Motion -- Laser Autocollimator for Measurement of Multi-axis Tilt Motion -- Surface Encoder for Measurement of In-plane Motion -- Grating Encoder for Measurement of In-plane and Out-of-plane Motion -- Scanning Multi-probe System for Measurement of Roundness -- Scanning Error Separation System for Measurement of Straightness -- Scanning Micro-stylus System for Measurement of Micro-aspherics -- Large Area Scanning Probe Microscope for Micro-textured Surfaces -- Automatic Alignment Scanning Probe Microscope System for Measurement of 3D Nanostructures -- Scanning Image-sensor System for Measurement of Micro-dimensions.
520 _aPrecision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to stage motions of precision machines. The first half of the book is dedicated to the description of optical sensors for the measurement of angle and displacement, which are fundamental quantities for precision nanometrology. The second half presents a number of scanning-type measuring systems for surface forms and stage motions. The systems discussed include: • error separation algorithms and systems for measurement of straightness and roundness, • the measurement of micro-aspherics, • systems based on scanning probe microscopy, and • scanning image-sensor systems. Precision Nanometrology presents the fundamental and practical technologies of precision nanometrology with a helpful selection of algorithms, instruments and experimental data. It will be beneficial for researchers, engineers and postgraduate students involved in precision engineering, nanotechnology and manufacturing. The Springer Series in Advanced Manufacturing publishes the best teaching and reference material to support students, educators and practitioners in manufacturing technology and management. This international series includes advanced textbooks, research monographs, edited works and conference proceedings covering all subjects in advanced manufacturing. The series focuses on new topics of interest, new treatments of more traditional areas and coverage of the applications of information and communication technology (ICT) in manufacturing.
590 _aPara consulta fuera de la UANL se requiere clave de acceso remoto.
710 2 _aSpringerLink (Servicio en línea)
_9299170
776 0 8 _iEdición impresa:
_z9781849962537
856 4 0 _uhttp://remoto.dgb.uanl.mx/login?url=http://dx.doi.org/10.1007/978-1-84996-254-4
_zConectar a Springer E-Books (Para consulta externa se requiere previa autentificación en Biblioteca Digital UANL)
942 _c14
999 _c290994
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