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| 001 | 293418 | ||
| 003 | MX-SnUAN | ||
| 005 | 20160429155105.0 | ||
| 007 | cr nn 008mamaa | ||
| 008 | 150903s2005 gw | o |||| 0|eng d | ||
| 020 |
_a9783540268765 _99783540268765 |
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| 024 | 7 |
_a10.1007/b138230 _2doi |
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| 035 | _avtls000346752 | ||
| 039 | 9 |
_a201509030433 _bVLOAD _c201405070510 _dVLOAD _y201402070904 _zstaff |
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_aMX-SnUAN _bspa _cMX-SnUAN _erda |
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| 100 | 1 |
_aFrühauf, Joachim. _eautor _9325990 |
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| 245 | 1 | 0 |
_aShape and Functional Elements of the Bulk Silicon Microtechnique : _bA Manual of Wet-Etched Silicon Structures / _cby Joachim Frühauf. |
| 264 | 1 |
_aBerlin, Heidelberg : _bSpringer Berlin Heidelberg, _c2005. |
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| 300 |
_axii, 221 páginas 165 ilustraciones _brecurso en línea. |
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| 336 |
_atexto _btxt _2rdacontent |
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| 337 |
_acomputadora _bc _2rdamedia |
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| 338 |
_arecurso en línea _bcr _2rdacarrier |
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| 347 |
_aarchivo de texto _bPDF _2rda |
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| 500 | _aSpringer eBooks | ||
| 505 | 0 | _aTechnological Basis of Bulk-Silicon-Microtechnique -- Orientation Dependent Etching of Silicon -- General Overview of the Shape- and Functional Elements and the Procedure of their Design -- Simple Shape Elements -- Elements for Mechanical Applications -- Elements for Fluidic Applications -- Elements for Optical Applications. | |
| 520 | _aThis methodic manual presents a survey of the form-related and functional elements of the bulk silicon microtechnique. It gives a systematic description of simple shape elements and of elements for mechanical, fluidic and optical applications. This manual includes practical instructions for the use of the relevant techniques and an extensive collection of examples for the support of the search for applications via photographs, drawings and references. It serves as a valuable guide to the design of etch masks and processes while summarizing the important properties of silicon, especially aiming at producers of sensors and microtechnical components, as well as producers of components of precision engineering and optical applications. | ||
| 590 | _aPara consulta fuera de la UANL se requiere clave de acceso remoto. | ||
| 710 | 2 |
_aSpringerLink (Servicio en línea) _9299170 |
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| 776 | 0 | 8 |
_iEdición impresa: _z9783540221098 |
| 856 | 4 | 0 |
_uhttp://remoto.dgb.uanl.mx/login?url=http://dx.doi.org/10.1007/b138230 _zConectar a Springer E-Books (Para consulta externa se requiere previa autentificación en Biblioteca Digital UANL) |
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