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001			293461
003			MX-SnUAN
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007			cr nn 008mamaa
008			150903s2005 gw | o |||| 0|eng d
020			_a9783540266679 _99783540266679
024	7		_a10.1007/b137894 _2doi
035			_avtls000346681
039		9	_a201509031116 _bVLOAD _c201405070509 _dVLOAD _y201402070903 _zstaff
040			_aMX-SnUAN _bspa _cMX-SnUAN _erda
100	1		_aBasting, Dirk. _eeditor. _9326063
245	1	0	_aExcimer Laser Technology / _cedited by Dirk Basting, Gerd Marowsky.
264		1	_aBerlin, Heidelberg : _bSpringer Berlin Heidelberg, _c2005.
300			_axIx, 433 páginas 257 ilustraciones _brecurso en línea.
336			_atexto _btxt _2rdacontent
337			_acomputadora _bc _2rdamedia
338			_arecurso en línea _bcr _2rdacarrier
347			_aarchivo de texto _bPDF _2rda
500			_aSpringer eBooks
505	0		_aIntroductory Remarks -- Fundamentals -- Some Fundamentals of Laser Physics -- Principles of Excimer Lasers -- Design and Technology of Excimer Lasers -- High-Repetition-Rate and High-Power Lasers -- High-Energy Lasers -- Excimer Lasers for Microlithography -- Laser Beam Characterization -- Optical Coatings for Excimer Laser Applications -- Small Structures with Large Excimer Lasers -- Historical Review of Excimer Laser Development -- Applications -- Overview -- Ablation -- Micro-Machining -- Via Drilling -- Micro-Processing of Borosilicate Glass and Polymers -- F2-Laser Microfabrication for Photonics and Biophotonics -- Nano-Structuring with Femtosecond Excimer Laser Pulses -- Physical Aspects of Ultra-Fast UV Laser Transfer -- Microlithography -- TFT Annealing -- Fiber Bragg Gratings -- Marking -- Activation and Metallization of Dielectrics -- Excimer-Laser Assisted Deposition of Carbon and Boron Nitride-Based High-Temperature Superconducting Films -- Combustion Analysis -- Medical Applications of Excimer Lasers -- High-Intensity Applications of Excimer Lasers -- High-Repetition-Rate Applications of Excimer Lasers -- New Frontiers: Extreme-Ultraviolet (EUV) Technology at 13.5 nm -- Trends in Worldwide Excimer Laser Sales.
520			_aThis comprehensive survey on Excimer Lasers investigates the current range of the technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F2 laser technology. Additional chapters on optics, devices and laser systems complete this compact handbook. A must read for laser technology students, process application researchers, engineers or anyone interested in excimer laser technology. An effective and understandable introduction to the current and future status of excimer laser technology.
590			_aPara consulta fuera de la UANL se requiere clave de acceso remoto.
700	1		_aMarowsky, Gerd. _eeditor. _9326064
710	2		_aSpringerLink (Servicio en línea) _9299170
776	0	8	_iEdición impresa: _z9783540200567
856	4	0	_uhttp://remoto.dgb.uanl.mx/login?url=http://dx.doi.org/10.1007/b137894 _zConectar a Springer E-Books (Para consulta externa se requiere previa autentificación en Biblioteca Digital UANL)
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999			_c293461 _d293461