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001			294081
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008			150903s2005 gw | o |||| 0|eng d
020			_a9783540273721 _99783540273721
024	7		_a10.1007/b138987 _2doi
035			_avtls000346945
039		9	_a201509031103 _bVLOAD _c201405070516 _dVLOAD _y201402070920 _zstaff
040			_aMX-SnUAN _bspa _cMX-SnUAN _erda
100	1		_aHierlemann, Andreas. _eautor _9327317
245	1	0	_aIntegrated Chemical Microsensor Systems in CMOS Technology / _cby Andreas Hierlemann ; edited by H. Baltes, Hiroyuki Fujita, Dorian Liepmann.
264		1	_aBerlin, Heidelberg : _bSpringer Berlin Heidelberg, _c2005.
300			_aIx, 229 páginas 125 ilustraciones _brecurso en línea.
336			_atexto _btxt _2rdacontent
337			_acomputadora _bc _2rdamedia
338			_arecurso en línea _bcr _2rdacarrier
347			_aarchivo de texto _bPDF _2rda
490	0		_aMicrotechnology and MEMS, _x1615-8326
500			_aSpringer eBooks
505	0		_aFundamentals of Chemical Sensing -- Microtechnology for Chemical Sensors -- Microfabricated Chemical Sensors -- CMOS Platform Technology for Chemical Sensors -- Outlook and Future Developments.
520			_aThis book, "Integrated Chemical Microsensor Systems in CMOS Technology", provides a comprehensive treatment of the highly interdisciplinary field of CMOS chemical microsensor systems. It is targeted at students, scientists and engineers who are interested in gaining an introduction to the field of chemical sensing since all the necessary fundamental knowledge is included. However, as it provides detailed information on all important issues related to the realization of chemical microsensors in CMOS technology, it also addresses experts well familiar with the field. After a brief introduction, the fundamentals of chemical sensing are presented. Fabrication and processing steps that are commonly used in the semiconductor industry are then detailed followed by a short description of the microfabrication techniques, and of the CMOS substrate and materials. Thereafter, a comprehensive overview of semiconductor-based and CMOS-based transducer structures for chemical sensors is given. CMOS-technology is then introduced as platform technology, which enables the integration of these microtransducers with the necessary driving and signal conditioning circuitry on the same chip. In a next section, the development of monolithic multisensor arrays and fully developed microsystems with on-chip sensor control and standard interfaces is described. A short section on packaging shows that techniques from the semiconductor industry can be applied to chemical microsensor packaging. The book concludes with a brief outlook on future developments, such as the realization of more complex integrated microsensor systems and methods to interface biological materials, such as cells, with CMOS microelectronics.
590			_aPara consulta fuera de la UANL se requiere clave de acceso remoto.
700	1		_aBaltes, H. _eeditor. _9327318
700	1		_aFujita, Hiroyuki. _eeditor. _9327319
700	1		_aLiepmann, Dorian. _eeditor. _9327320
710	2		_aSpringerLink (Servicio en línea) _9299170
776	0	8	_iEdición impresa: _z9783540237822
856	4	0	_uhttp://remoto.dgb.uanl.mx/login?url=http://dx.doi.org/10.1007/b138987 _zConectar a Springer E-Books (Para consulta externa se requiere previa autentificación en Biblioteca Digital UANL)
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999			_c294081 _d294081