| 000 | 02647nam a22003735i 4500 | ||
|---|---|---|---|
| 001 | 294248 | ||
| 003 | MX-SnUAN | ||
| 005 | 20160429155139.0 | ||
| 007 | cr nn 008mamaa | ||
| 008 | 150903s2005 gw | o |||| 0|eng d | ||
| 020 |
_a9783540274124 _99783540274124 |
||
| 024 | 7 |
_a10.1007/b139047 _2doi |
|
| 035 | _avtls000346956 | ||
| 039 | 9 |
_a201509031103 _bVLOAD _c201405070516 _dVLOAD _y201402070920 _zstaff |
|
| 040 |
_aMX-SnUAN _bspa _cMX-SnUAN _erda |
||
| 100 | 1 |
_aLi, Flora M. _eautor _9327631 |
|
| 245 | 1 | 0 |
_aCCD Image Sensors in Deep-Ultraviolet : _bDegradation Behavior and Damage Mechanisms / _cby Flora M. Li, Arokia Nathan. |
| 264 | 1 |
_aBerlin, Heidelberg : _bSpringer Berlin Heidelberg, _c2005. |
|
| 300 |
_axI, 231 páginas 84 ilustraciones _brecurso en línea. |
||
| 336 |
_atexto _btxt _2rdacontent |
||
| 337 |
_acomputadora _bc _2rdamedia |
||
| 338 |
_arecurso en línea _bcr _2rdacarrier |
||
| 347 |
_aarchivo de texto _bPDF _2rda |
||
| 490 | 0 |
_aMicrotechnology and Mems, _x1615-8326 |
|
| 500 | _aSpringer eBooks | ||
| 505 | 0 | _aOverview of CCD -- CCD Imaging in the Ultraviolet (UV) Regime -- Silicon -- Silicon Dioxide -- Si-SiO2 Interface -- General Effects of Radiation -- Effects of Radiation on CCDs -- UV-Induced Effects in Si -- UV Laser Induced Effects in SiO2 -- UV Laser Induced Effects at the Si-SiO2 Interface -- CCD Measurements at 157nm -- Design Optimizations for Future Research -- Concluding Remarks. | |
| 520 | _aAs the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths. | ||
| 590 | _aPara consulta fuera de la UANL se requiere clave de acceso remoto. | ||
| 700 | 1 |
_aNathan, Arokia. _eautor _9327632 |
|
| 710 | 2 |
_aSpringerLink (Servicio en línea) _9299170 |
|
| 776 | 0 | 8 |
_iEdición impresa: _z9783540226802 |
| 856 | 4 | 0 |
_uhttp://remoto.dgb.uanl.mx/login?url=http://dx.doi.org/10.1007/b139047 _zConectar a Springer E-Books (Para consulta externa se requiere previa autentificación en Biblioteca Digital UANL) |
| 942 | _c14 | ||
| 999 |
_c294248 _d294248 |
||