000 02485nam a22003975i 4500
001 301506
003 MX-SnUAN
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007 cr nn 008mamaa
008 150903s2011 gw | o |||| 0|eng d
020 _a9783642129032
_99783642129032
024 7 _a10.1007/9783642129032
_2doi
035 _avtls000355014
039 9 _a201509030949
_bVLOAD
_c201405060344
_dVLOAD
_y201402191032
_zstaff
040 _aMX-SnUAN
_bspa
_cMX-SnUAN
_erda
050 4 _aT174.7
100 1 _aBüttgenbach, Stephanus.
_eeditor.
_9339376
245 1 0 _aDesign and Manufacturing of Active Microsystems /
_cedited by Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach.
264 1 _aBerlin, Heidelberg :
_bSpringer Berlin Heidelberg,
_c2011.
300 _axii, 444 páginas
_brecurso en línea.
336 _atexto
_btxt
_2rdacontent
337 _acomputadora
_bc
_2rdamedia
338 _arecurso en línea
_bcr
_2rdacarrier
347 _aarchivo de texto
_bPDF
_2rda
490 0 _aMicrotechnology and MEMS,
_x1615-8326
500 _aSpringer eBooks
505 0 _a1. Introduction -- 2. Design and Construction -- 3. Guiding and Measuring in Active Microsystems -- 4. Manufacturing and Fabrication -- 5. Microassembly -- 6.Industrial Applications.
520 _aThis book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.
590 _aPara consulta fuera de la UANL se requiere clave de acceso remoto.
700 1 _aBurisch, Arne.
_eeditor.
_9339377
700 1 _aHesselbach, Jürgen.
_eeditor.
_9339378
710 2 _aSpringerLink (Servicio en línea)
_9299170
776 0 8 _iEdición impresa:
_z9783642129025
856 4 0 _uhttp://remoto.dgb.uanl.mx/login?url=http://dx.doi.org/10.1007/978-3-642-12903-2
_zConectar a Springer E-Books (Para consulta externa se requiere previa autentificación en Biblioteca Digital UANL)
942 _c14
999 _c301506
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