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020 _a9789048197019
_99789048197019
024 7 _a10.1007/9789048197019
_2doi
035 _avtls000365859
039 9 _a201509030658
_bVLOAD
_c201405070420
_dVLOAD
_y201402211303
_zstaff
040 _aMX-SnUAN
_bspa
_cMX-SnUAN
_erda
050 4 _aT174.7
100 1 _aOstasevicius, Vytautas.
_eautor
_9354190
245 1 0 _aMicrosystems Dynamics /
_cby Vytautas Ostasevicius, Rolanas Dauksevicius.
264 1 _aDordrecht :
_bSpringer Netherlands :
_bImprint: Springer,
_c2011.
300 _aviii, 214 páginas
_brecurso en línea.
336 _atexto
_btxt
_2rdacontent
337 _acomputadora
_bc
_2rdamedia
338 _arecurso en línea
_bcr
_2rdacarrier
347 _aarchivo de texto
_bPDF
_2rda
490 0 _aIntelligent Systems, Control and Automation: Science and Engineering,
_x2213-8986 ;
_v44
500 _aSpringer eBooks
505 0 _aForeword -- Preface -- Introduction to Microsystems -- Fabrication Technologies of Microsystems -- Overview -- Nickel Surface Micromachining Technology for Fabrication of Microswitches -- UV Lithography for Fabrication of Micromotors -- Common MEMS Actuators -- Parallel Plate Capacitors -- Comb Drives -- Electrostatic Micromotors -- Electrostatic Microswitches -- Theoretical Background of Multiphysical Interactions Common in Microsystems -- Introduction to Coupled-Field Modeling -- Electrostatic Actuation and Pull-in Instability -- Viscous Air Damping -- Vibro-Impact Interactions -- Experimental Testing of Microsystem Dynamics -- Vibration Excitation Methods -- Optical Techniques for Measurement of Vibrations of Microstructures -- Study of Elastic Vibro-Impact Macrosystems and Microsystems -- Overview of Important New Effects of Nonlinear Dynamics in Vibro-Impact -- Macrosystems -- -- Analysis of Coupled-Field Dynamics in Contact-Type Electrostatic Microactuator -- Numerical Modeling and Analysis of Fluidic-Structural Interaction -- Numerical Modeling and Analysis of Electrostatic-Structural Interaction -- Numerical Modeling and Analysis of Vibro-Impact Interaction -- Numerical Analysis of the Micromotor -- Finite Element Modeling of Micromotor -- Modal Analysis -- Micromotor Control -- Analytical Model of a Micromotor -- Basics of Micromotor Geometry -- Torque Analysis -- Micromotor Design Guidelines -- References.
520 _aIn recent years microelectromechanical systems (MEMS) have emerged as a new technology with enormous application potential. MEMS manufacturing techniques are essentially the same as those used in the semiconductor industry, therefore they can be produced in large quantities at low cost. The added benefits of lightweight, miniature size and low energy consumption make MEMS commercialization very attractive. Modeling and simulation is an indispensable tool in the process of studying these new dynamic phenomena, development of new microdevices and improvement of the existing designs. MEMS technology is inherently multidisciplinary since operation of microdevices involves interaction of several energy domains of different physical nature, for example, mechanical, fluidic and electric forces. Dynamic behavior of contact-type electrostatic microactuators, such as a microswitches, is determined by nonlinear fluidic-structural, electrostatic-structural and vibro-impact interactions. The latter is particularly important: Therefore it is crucial to develop accurate computational models for numerical analysis of the aforementioned interactions in order to better understand coupled-field effects, study important system dynamic characteristics and thereby formulate guidelines for the development of more reliable microdevices with enhanced performance, reliability and functionality.
590 _aPara consulta fuera de la UANL se requiere clave de acceso remoto.
700 1 _aDauksevicius, Rolanas.
_eautor
_9354191
710 2 _aSpringerLink (Servicio en línea)
_9299170
776 0 8 _iEdición impresa:
_z9789048197002
856 4 0 _uhttp://remoto.dgb.uanl.mx/login?url=http://dx.doi.org/10.1007/978-90-481-9701-9
_zConectar a Springer E-Books (Para consulta externa se requiere previa autentificación en Biblioteca Digital UANL)
942 _c14
999 _c312472
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